Jandel CT6 Four Point Probe Heads for use with Prometrix (KLA/Tencor) and CDE (Creative Design Engineering) Resistivity Mapping Systems.
JANDEL ENGINEERING LTD. manufactures the CT6 in two versions, one for use with KLA/Tencor (formerly Prometrix) resistivity wafer mapping systems, and the other for use with CDE (Creative Design Engineering) resistivity wafer mapping systems. The probes have a 1″ diameter body, are 1.6″ high (25.4mm x 41mm high) and weigh 55g. Although the two types of probe look similar, they are not interchangeable between the two types of systems due to differences in tip retraction.
These probes are sold in all of the various “types” (A, B, C, etc) and are available with the special close needle spacing of 20 mils.
A link to the Prometrix Four Point Probe Tip Specifications Applications Chart
The specification chart shows some of the most common tips spacings and needle radii that are offered.
Jandel four point probe heads are built with upper and lower jewel bearings and are built to a high level of mechanical accuracy. Final testing involves the use of calibrated measurement instruments (electronic force gauge, video inspection system, interferometer) to verify tip radii, tip spacing, spring load, and tip planerity. More information about the quality of Jandel probes can be found here: https://four-point-probes.com/probe_app_notes.pdf
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Four-Point-Probes is a division of Bridge Technology. To request further information please call Bridge Technology at (480) 219-9007 or send e-mail to Joshua Bridge at: sales@bridgetec.com