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RM3000 Test Unit with PC Software

The RM3000 Test Unit is a specialty electronics instruments designed specifically for the four point probe measurement. It features high accuracy, an excellent range, and many features which simplify the four point probing measurement.

Jandel RM3000 Test Unit with PC Software

Combined Constant Current Source and Digital Voltmeter Designed
Specifically for the Four Point Probe Measurement

 The following are features of the RM3000 Test Unit:

  • The sheet resistance range of the RM3000 Test Unit is from 1 milliohm-per-square (10^-3) up to 5 x 10^8 ohms-per-square with 0.3% accuracy. The volume resistivity range is from 1 milliohm-cm (10^-3) up to 10^6 ohms-cm, however, that resistivity range refers to measuring a bulk material directly as opposed to measuring a thin film and converting to volume resistivity using the software. For example, a thin layer of copper (1.68 x 10^-6 ohm-cm) up to about 16 microns thick can be measured. The RM3000 can determine the volume resistivity value if one enters the film thickness.
  • The RM3000 includes PC control software which can be used for measurement logging (storing data in CSV format) and can save measured values as sheet resistance or volume resistivity.
  • The RM3000 display reads-out the input current as well as either ohms-per-square (sheet resistance), ohms-cm (volume resistivity), or millivolts, without requiring the use of the included PC software. The volume resistivity readout requires entering thickness for a wafer or thin film, or tip spacing if measuring a bulk sample.
  • The RM3000 has onboard non-volatile memory so that up to 50 measurements can be stored internally and then downloaded and saved all at one time using the software. Alternately, each measurement can be saved to a PC as it is made using the included software.
  • The RM3000 has an auto-range button that can be used to automatically determine the optimum input current for a given material without using the trial and error method.
  • The RM3000 has forward (FWD) and reverse (REV) buttons to reverse the direction of current flow. A common way to determine if a measurement is valid is to reverse the direction of current flow and then check to see if the forward and reverse voltage readings correlate well, i.e., the values should be similar, but with the reverse current voltage being a negative value.
  • The RM3000 allows the input of a correction factor for samples that need to be corrected for size.
  • The RM3000 has a date and time stamp feature
  • The RM3000 interfaces with optional AFPP motorized Z-motion arm

SPECIFICATIONS: Superior Current Source

  • 10nA to 100mA (99.999mA) current source selectable in steps to 3 decimal place resolution
  • Current set numeric keypad
  • 4 default preset current programs (user programmable)

Superior Inbuilt DVM

  • Input Impedance 1,000,000,000,000 ohms
  • Input Bias current 4pA
  • DVM 1300mV range and 130mV range
  • 130mV accuracy
  • 0.2% +/- 5uV resolution (10uV or 1uV) range
  • 1300mV accuracy 0.2%+/-100uV resolution
  • 100uV Ohms/Square
  • Rapid Zeroing null function for DVM

Features

  • 28 Key high quality Keypad
  • 16×2 line LCD Display for simultaneous indication of Set Current and either Ohms/Sq or mV
  • Auto-Ranging capability to determine the optimum input current based upon the material being measured.
  • Intuitive operation
  • Microprocessor controlled
  • Reduced Footprint
  • Robust Attractive ABS Case
  • Accurately measures down to 10’s of milliohms/square without external meter
  • 4mm socket facility to connect an external meter
  • RS232/USB connectivity for control and for collecting data in CSV format
  • Automatic compliance voltage limit protects your sample which reduces maximum voltage as higher currents are set 5-40V
  • Warning messages when compliance limit is reached, or DVM input exceeded
  • Self test facility
  • Flash upgradeable software
  • CE Marked
  • AD/DA converters and amplifiers for the DVM and setting the Current source and DVM, are Burr Brown 110V or 240V operation (selectable)
Jandel RM3000 Test Unit with PC Software

(Click image to see a larger photo)


Shown here displaying result in ohms-per-square
(Click image to see a larger photo)

Viewing and Storing the RM3000 Measurement Data

1) The RM3000 Test Unit displays sheet resistance on the front panel which can be recorded manually, or

2) Data can be saved by pressing the “save” button on the RM3000 front panel (with or without a PC connected), in which case the data is stored internal to the RM3000’s on-board NVM memory (data from up to 50 measurments), or

3) Data can be saved directly to a PC file by using the software while the RM3000 is connected to a PC, in which case you click on the “save” button on the graphically reproduced image of the RM3000 front panel which will be on the PC screen.

Data stored on a PC is saved in CSV format, which is a file type that can be opened with Excel. A example of the files that can be stored for both sheet resistance and volume resistivity can be found here: csv_file_examples.pdf
 


Downloads

Instruction manual for the RM3000 which includes software instructions (700k pdf file) Instruction manual for the RM3000 which includes software instructions (700k pdf file)
A one page PDF file showning how the data is displayed and viewed using the RM3000 Test Unit (168K PDF file) A one page PDF file showning how the data is displayed and viewed using the RM3000 Test Unit (168K PDF file)
Product information for the 100 Ohm DIN Resistor Plug. For use with the RM3 and RM3000 Test Unit. Product information for the 100 Ohm DIN Resistor Plug. For use with the RM3 and RM3000 Test Unit.

 


System Configurations

Multiposition Wafer Probe with RM3000 Test Unit Multiposition Wafer Probe with RM3000 Test Unit
Multi Height Probe with RM3000 Test Unit Multi Height Probe with RM3000 Test Unit
Multi Height Microposition Probe with RM3000 Test Unit Multi Height Microposition Probe with RM3000 Test Unit
Hand Applied Probe with RM3000 Test Unit Hand Applied Probe with RM3000 Test Unit
SRM Probe Head Combined with RM3000 Test Unit SRM Probe Head Combined with RM3000 Test Unit

 


Four-Point-Probes is a division of Bridge Technology. To request further information please call Bridge Technology at (480) 988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com