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SRM-RM3000 Four Point Probing System

The SRM probe is a lower cost plastic bodied probe that is suitable for use in measuring a wide range of materials including various conductive coatings, ITO on glass, silicon wafers, ingots, potscrap, conductive paints, and various thin films.

Jandel SRM Probe Head Combined with RM3000 Test Unit

SRM Probe Head Combined with RM3000 Test Unit

About the SRM Probe

The SRM probe is a lower cost plastic bodied probe that is suitable for use in measuring a wide range of materials including various conductive coatings, ITO on glass, silicon wafers, ingots, potscrap, conductive paints, and various thin films. The connection to the probe head is made via a female RJ45 connector which is the same type of connector used for Ethernet connections. In this configuration, the RM3000 is supplied with a 1 meter long cable that plugs directly into the SRM probe head.

Holding a probe head by hand does not always work well when measuring higher resistance materials and films, however, for many materials it is suitable. Since the probe does not have a switch to control the flow of current, it is best to switch the RM3000 into the standby mode until the tips are placed into contact so that sparking does not occur as the probe tip approach the material to be tested.

The SRM probe heads are available in three choices of tip spacing, three choices of spring load, two choices of tip material, and three choices of tip radii.

The RM3000 Test Unit is a specialty electronics instrument designed specifically for the four point probe measurement. It features high accuracy, an excellent range, and many features which simplify the four point probing measurement. The following are features of the RM3000 Test Unit:

  • The sheet resistance range of the RM3000 Test Unit is from 1 milliohm-per-square (10^-3) up to 5 x 10^8 ohms-per-square with 0.3% accuracy. The volume resistivity range is from 1 milliohm-cm (10^-3) up to 10^6 ohms-cm, however, that resistivity range refers to measuring a bulk material directly as opposed to measuring a thin film and converting to volume resistivity using the software. For example, a thin layer of copper (1.68 x 10^-6 ohm-cm) up to about 16 microns thick can be measured. The RM3000 can determine the volume resistivity value if one enters the film thickness.
  • The RM3000 includes PC control software which can be used for measurement logging (storing data in CSV format) and can save measured values as sheet resistance or volume resistivity.
  • The RM3000 display reads-out the input current as well as either ohms-per-square (sheet resistance), ohms-cm (volume resistivity), or millivolts, without requiring the use of the included PC software. The volume resistivity readout requires entering thickness for a wafer or thin film, or tip spacing if measuring a bulk sample.
  • The RM3000 has onboard non-volatile memory so that up to 50 measurements can be stored internally and then downloaded and saved all at one time using the software. Alternately, each measurement can be saved to a PC as it is made using the included software.
  • The RM3000 has an auto-range button that can be used to automatically determine the optimum input current for a given material without using the trial and error method.
  • The RM3000 has forward (FWD) and reverse (REV) buttons to reverse the direction of current flow. A common way to determine if a measurement is valid is to reverse the direction of current flow and then check to see if the forward and reverse voltage readings correlate well, i.e., the values should be similar, but with the reverse current voltage being a negative value.
  • The RM3000 allows the input of a correction factor for samples that need to be corrected for size.
  • The RM3000 has a date and time stamp feature
  • The RM3000 interfaces with optional AFPP motorized Z-motion arm

Superior Current Source

  • 10nA to 100mA (99.999mA) current source selectable in steps to 3 decimal place resolution
  • Current set numeric keypad
  • 4 default preset current programs (user programmable)

Superior Inbuilt DVM

  • Input Impedance 1,000,000,000,000 ohms
  • Input Bias current 4pA
  • DVM 1300mV range and 130mV range
  • 130mV accuracy
  • 0.2% +/- 5uV resolution (10uV or 1uV) range
  • 1300mV accuracy 0.2%+/-100uV resolution
  • 100uV Ohms/Square
  • Rapid Zeroing null function for DVM

Features

  • 28 Key high quality Keypad
  • 16×2 line LCD Display for simultaneous indication of Set Current and either Ohms/Sq or mV
  • Auto-Ranging capability to determine the optimum input current based upon the material being measured.
  • Intuitive operation
  • Microprocessor controlled
  • Reduced Footprint
  • Robust Attractive ABS Case
  • Accurately measures down to 10’s of milliohms/square without external meter
  • 4mm socket facility to connect an external meter
  • RS232/USB connectivity for control and for collecting data in CSV format
  • Automatic compliance voltage limit protects your sample which reduces maximum voltage as higher currents are set 5-40V
  • Warning messages when compliance limit is reached, or DVM input exceeded
  • Self test facility
  • Flash upgradeable software
  • CE Marked
  • AD/DA converters and amplifiers for the DVM and setting the Current source and DVM, are Burr Brown 110V or 240V operation (selectable)

Downloads

Product Brochure regarding the SRM Probe Head combined with the RM3000 Test Unit Product Brochure regarding the SRM Probe Head combined with the RM3000 Test Unit
Product Brochure for the SRM Probe Head Product Brochure for the SRM Probe Head
Instruction manual for the RM3000 Test Unit (688K PDF file) Instruction manual for the RM3000 Test Unit(688K PDF file)

 


We Recommend

If you do not require as great a measurement range as the RM3000 Test Unit provides, you might be interested in the:

SRM Probe Head combined with HM21-SRM Hand Held Meter.

 


Four-Point-Probes is a division of Bridge Technology. To request further information please call Bridge Technology at (480) 988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com