Manual or Automatic Four Point Probe

Signatone QuadPro 300 mm Thin Film Resistivity Measurement System

 

Manual or Automatic Four Point Probe. Signatone QuadPro 300 mm Thin Film Resistivity Measurement System

The Signatone QuadPro Process Development Resistivity System is available in both 8" and 12" systems. The systems are motorized and can automatically step through 9, 25, 49, or 121 test points on wafers of size 100 mm, 125 mm, 150 mm, 200 mm, or 300mm.

 

The systems use four point probes with a state of the art current source and electronic DVM combined with a dual configuration test procedure and test integration to obtain an accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square. The accuracy and calibration are NIST traceable. The automatic system is fully integrated and operates under an MS Windows based controller.

 

The friendly software allows one click single point measurements or one click automatic wafer mapping with the average and standard deviation displayed and either 2D or 3D maps of the results. A live display of the current test point location and result is available. If any point is suspect, it may be re-tested by clicking on the table entry, after retest, and the system allows a choice of acceptance of the new test data. The results are stored in ASCII files and may be uploaded to a host system for trend analysis through an optional Local Area Network (LAN). Other options include a light shield and the addition of a thermal chuck and temperature control and software for the measurement of the Temperature Coefficient of Resistance (TCR). Also, a wafer handler may be added for fully automatic operation.

 

Features:

 

  • Easy to Use - From the Original Resistivity Company
  • Flexible - Software & Hardware
  • LAN Compatible
  • Temperature Control from Ambient - +125°C
  • 9, 25, 49 & 121 Data Point Options, With 2D & 3D Plots
  • Resistance & Resistivity or Thickness Measurements
  • Measures Temperature Coefficient of Resistance
  • Optional High Temperature Range of Ambient up to +400° C

 

Menu Commands:

 

  • Set Wafer Size
  • Select # of Points
  • Set Edge Exclusion
  • Optional Re-Test Points
  • Save Results & Plot 2D or 3D Map
  • Save Data for Trend Analysis
  • Up-Load to Host
  • Optional - Set/Read Temperature

 

Specifications:

 

  • Sample Size: 100mm, 125mm, 150mm, 200mm, & 300mm
  • Resistance Standard Range: 1 Milli-ohm to 2Meg ohms per square
  • Testing Procedure: Dual Configuration & Integration
  • Accuracy: Better than 1% for the Standard Range
  • Calibration: NIST Traceable Certificate
  • Output: 2D Color Map, 3D Contour Map, Diameter Plot
  • Automatically Displays: Average & Standard Deviation

Click on photo to see a larger image.

 

 

Options:

 

  • Calculate & Plot film thickness or resistivity
  • LAN Interface to upload data files ( ASCII ) to a host system
  • Temperature Control for Temperature Coefficient of Resistance (TCR) measurement.
  • Auto Wafer Handling System

 

 

Four-Point-Probes is a division of Bridge Technology. To request further information please call Bridge Technology at (480) 988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com